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Integration of the fabrication processes and wafer level packaging of MEMS devices using localized induction heating

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3 Author(s)
Hsuehan Yang ; Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Mingching Wu ; Weileun Fang

Author(s)

Hsuehan Yang
Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Mingching Wu ; Weileun Fang