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Extension and source/drain design for high-performance FinFET devices

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9 Author(s)
Kedzierski, J. ; IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA ; Meikei Ieong ; Nowak, E. ; Kanarsky, T.S.
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Author(s)

Kedzierski, J.
IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
Meikei Ieong ; Nowak, E. ; Kanarsky, T.S. ; Ying Zhang ; Roy, R. ; Boyd, D. ; Fried, D. ; Wong, H.-S.P.