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Self-balanced navigation-grade capacitive microaccelerometers using branched finger electrodes and their performance for varying sense voltage and pressure

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2 Author(s)
Ki-Ho Han ; Digital Nanolocomotion Center, Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea ; Young-Ho Cho

Author(s)

Ki-Ho Han
Digital Nanolocomotion Center, Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Young-Ho Cho