By Topic

Guest Editorial Equipment and Operations Automation in the Semiconductor Industry

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
7 Author(s)
James R. Morrison ; Korea Advanced Institute of Science and Technology (KAIST), Yuseong, Daejeon, Korea ; Chen-Fu Chien ; Stéphane Dauzère-Pérès ; Milind Dawande
more authors

Author(s)

James R. Morrison
Korea Advanced Institute of Science and Technology (KAIST), Yuseong, Daejeon, Korea
Chen-Fu Chien ; Stéphane Dauzère-Pérès ; Milind Dawande ; Han Ding ; Jeffrey S. Pettinato ; Jingang Yi