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Small-defect detection in sub-100nm SRAM cells using a WL-pulse timing-margin measurement scheme

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8 Author(s)
Morita, Y. ; Device Platforms Res. Labs., NEC Corp., Sagamihara, Japan ; Nose, K. ; Noguchi, K. ; Takami, S.
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Author(s)

Morita, Y.
Device Platforms Res. Labs., NEC Corp., Sagamihara, Japan
Nose, K. ; Noguchi, K. ; Takami, S. ; Goto, K. ; Aimoto, Y. ; Kimura, A. ; Mizuno, M.