By Topic

IEEE Transactions on Semiconductor Manufacturing

Aims & Scope

The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes. 

Persistent Link: http://ieeexplore.ieee.org/servlet/opac?punumber=66 More »

Frequency: 4

Subjects

  • Components, Circuits, Devices & Systems
  • Engineered Materials, Dielectrics & Plasmas

Contacts

Editor-in-Chief

Anthony Muscat
Department of Chemical and Environmental Engineering
Harshbarger Bldg., Room 134
1133 E. James Rogers Way
University of Arizona
Tucson, AZ  85721
 
 
Publications Office Contact:
Marlene James
445 Hoes Lane
Piscataway, NJ  08854  08854  
USA
m.james@ieee.org

Contacts

Editor-in-Chief

Anthony Muscat
Department of Chemical and Environmental Engineering
Harshbarger Bldg., Room 134
1133 E. James Rogers Way
University of Arizona
Tucson, AZ  85721
 
 
Publications Office Contact:
Marlene James
445 Hoes Lane
Piscataway, NJ  08854  08854  
USA
m.james@ieee.org