Microelectromechanical Systems, Journal of
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The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Latest Published Articles
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Interdigitated 3-D Silicon Ring Microelectrodes for DEP-Based Particle Manipulation
Mar-29 2013 -
Parametric Excitation, Amplification, and Tuning of MEMS Folded-Beam Comb Drive Oscillator
Mar-29 2013 -
Photopatterning of Thiol-ene-Acrylate Copolymers
Mar-29 2013 -
Design, Simulation, and Characterization of a Bimorph Varifocal Micromirror and Its Application in an Optical Imaging System
Mar-29 2013 -
Crystallographic Effects on Energy Dissipation in High-
Silicon Bulk-Mode Resonators
Mar-29 2013
Popular Articles
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Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer
Aug-06 2002 -
Etch rates for micromachining processing-Part II
Jan-07 2004 -
Etch rates for micromachining processing
Aug-06 2002 -
What is the Young's Modulus of Silicon?
Apr-01 2010 -
Comparison of MEMS PZT Cantilevers Based on
and
Modes for Vibration Energy Harvesting
Jan-30 2013
Publish in this Journal
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems
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Popular Articles (March 2013)
Includes the top 25 most frequently downloaded documents for this publication according to the most recent monthly usage statistics.Society Sponsor
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1. Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer
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8. Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength
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14. Equilibrium swelling and kinetics of pH-responsive hydrogels: models, experiments, and simulations
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15. Temperature Dependence of Quality Factor in MEMS Resonators
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20. Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits
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Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems
Further Links
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field. The topics covered include: microsensing, microactuation, micromechanical structures, materials for microsystems, and the design and construction of microelectromechanical systems. The dimensions of MEMS components typically range from nanometers to millimeters, and the field is sometimes referred to as NEMS as well as MEMS to emphasize that engineering on the scale of nanometers is included in the tiny world of today’s microsystems. JMEMS covers a very diverse field of applications including communications, biomedical engineering, micro-optical systems, microfluidics, micropower generators and storage devices. The Journal is jointly sponsored by the IEEE Electron Devices Society (EDS), IEEE Industrial Electronics Society (IES) and IEEE Robotics and Automation Society (RAS), and is a publication both of IEEE and The American Society of Mechanical Engineers (ASME).
Those with interest in a fuller description of the Journal of Microelectromechanical Systems (JMEMS), can access the JMEMS Home Website (use ‘JMEMS Home’ in Google for quick access to this site). At this site are useful links that introduce prospective authors to the Editors serving JMEMS, and to websites providing advice and help for manuscript preparation.
Persistent Link: http://ieeexplore.ieee.org/servlet/opac?punumber=84 More »
Frequency: 6
ISSN: 1057-7157
Publication Details: Journal of Microelectromechanical Systems
Subjects
- Components, Circuits, Devices & Systems
- Engineered Materials, Dielectrics & Plasmas
Contacts
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems
Tannestrasse 3
CH-8092 Zürich, Switzerland
hierold@micro.mavt.ethz.ch
About this Journal
Content Announcements
Author Resources
Society Sponsor
Contacts
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems



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