Microelectromechanical Systems, Journal of
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The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Latest Published Articles
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Integrated Multifunctional Environmental Sensors
Roozeboom, C.L. ; Hopcroft, M.A. ; Smith, W.S. ; Sim, J.Y. ; Wickeraad, D.A. ; Hartwell, P.G. ; Pruitt, B.L.May-29 2013 -
A Simple Experimental Technique for Measuring the Poisson's Ratio of Microstructures
May-29 2013 -
Principles of Meniscus-Based MEMS Gas or Liquid Pressure Sensors
May-29 2013 -
Etching Process Effects on Surface Structure, Fracture Strength, and Reliability of Single-Crystal Silicon Theta-Like Specimens
May-29 2013 -
A Passive Inertial Switch Using MWCNT–Hydrogel Composite With Wireless Interrogation Capability
May-29 2013
Popular Articles
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Etch rates for micromachining processing-Part II
Jan-07 2004 -
Etch rates for micromachining processing
Aug-06 2002 -
Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer
Aug-06 2002 -
Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength
Jun-06 2005 -
What is the Young's Modulus of Silicon?
Apr-01 2010
Publish in this Journal
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems
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Popular Articles (May 2013)
Includes the top 25 most frequently downloaded documents for this publication according to the most recent monthly usage statistics.Society Sponsor
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3. Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer
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PDF (576 KB)
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4. Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength
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PDF (432 KB)
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6. Parametric Excitation, Amplification, and Tuning of MEMS Folded-Beam Comb Drive Oscillator
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PDF (980 KB)
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7. Electronic Detection Strategies for a MEMS-Based Biosensor
Burnett, R. ; Harris, A. ; Ortiz, P. ; Hedley, J. ; Burdess, J. ; Keegan, N. ; Spoors, J. ; McNeil, C.
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PDF (807 KB)
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9. Large Stroke Electrostatic Comb-Drive Actuators Enabled by a Novel Flexure Mechanism
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PDF (2060 KB)
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11. Interdigitated 3-D Silicon Ring Microelectrodes for DEP-Based Particle Manipulation
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PDF (1010 KB)
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13. Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits
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PDF (1323 KB)
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14. Temperature Dependence of Quality Factor in MEMS Resonators
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15. A Tunable Miniaturized RF MEMS Resonator With Simultaneous High
(500–735) and Fast Response Speed
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PDF (2200 KB)
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16. A Flexible Paper-Based Microdischarge Array Device for Maskless Patterning on Nonflat Surfaces
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PDF (439 KB)
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17. Design, Simulation, and Characterization of a Bimorph Varifocal Micromirror and Its Application in an Optical Imaging System
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PDF (2215 KB)
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18. Crystallographic Effects on Energy Dissipation in High-
Silicon Bulk-Mode Resonators
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PDF (565 KB)
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24. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
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PDF (364 KB)
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Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field.
Meet Our Editors
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems
Further Links
Aims & Scope
The Journal of Microelectromechanical Systems (JMEMS) typically covers advances in microsystems as defined by new methods, technologies, and applications in this field. The topics covered include: microsensing, microactuation, micromechanical structures, materials for microsystems, and the design and construction of microelectromechanical systems. The dimensions of MEMS components typically range from nanometers to millimeters, and the field is sometimes referred to as NEMS as well as MEMS to emphasize that engineering on the scale of nanometers is included in the tiny world of today’s microsystems. JMEMS covers a very diverse field of applications including communications, biomedical engineering, micro-optical systems, microfluidics, micropower generators and storage devices. The Journal is jointly sponsored by the IEEE Electron Devices Society (EDS), IEEE Industrial Electronics Society (IES) and IEEE Robotics and Automation Society (RAS).
Those with interest in a fuller description of the Journal of Microelectromechanical Systems (JMEMS), can access the JMEMS Home Website (use ‘JMEMS Home’ in Google for quick access to this site). At this site are useful links that introduce prospective authors to the Editors serving JMEMS, and to websites providing advice and help for manuscript preparation.
Persistent Link: http://ieeexplore.ieee.org/servlet/opac?punumber=84 More »
Frequency: 6
ISSN: 1057-7157
Publication Details: Journal of Microelectromechanical Systems
Subjects
- Components, Circuits, Devices & Systems
- Engineered Materials, Dielectrics & Plasmas
Contacts
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems
Tannestrasse 3
CH-8092 Zürich, Switzerland
hierold@micro.mavt.ethz.ch
About this Journal
Content Announcements
Author Resources
Society Sponsor
Contacts
Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems



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