Semiconductor Manufacturing, IEEE Transactions on
IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional.
Latest Published Articles
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Layered Drum-Buffer-Rope-Based Scheduling of Reentrant Manufacturing Systems
May-01 2013 -
A Survey of Yield Modeling and Yield Enhancement Methods
May-01 2013 -
Removal of Tetramethylammonium Hydroxide From Solution Using Ion Exchange
May-01 2013 -
A Literature Review on Sampling Techniques in Semiconductor Manufacturing
Nduhura-Munga, J. ; Rodriguez-Verjan, G. ; Dauzere-Peres, S. ; Yugma, C. ; Vialletelle, P. ; Pinaton, J.May-01 2013 -
Design and Fabrication of Si-Diaphragm, ZnO Piezoelectric Film-Based MEMS Acoustic Sensor Using SOI Wafers
May-01 2013
Popular Articles
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Model-based emissivity correction in pyrometer temperature control of rapid thermal processing systems
Aug-06 2002 -
CMOS Junctionless Field-Effect Transistors Manufacturing Cost Evaluation
Jan-30 2013 -
Through-Silicon-Via Fabrication Technologies, Passives Extraction, and Electrical Modeling for 3-D Integration/Packaging
Jan-30 2013 -
Fifty Years of Moore's Law
May-02 2011 -
The Evolution of Pixel Structures for Consumer-Grade Image Sensors
Jan-30 2013
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Meet Our Editors
Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA 95054 95054 USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955
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Popular Articles (March 2013)
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1. Model-based emissivity correction in pyrometer temperature control of rapid thermal processing systems
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8. Design and Fabrication of Si-Diaphragm, ZnO Piezoelectric Film-Based MEMS Acoustic Sensor Using SOI Wafers
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17. VM-Based Baseline Predictive Maintenance Scheme
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18. Impact of gate induced drain leakage on overall leakage of submicrometer CMOS VLSI circuits
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19. Lot Size Management in the Semiconductor Industry: Queueing Analysis for Cycle Time Optimization
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Aims & Scope
IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional.
Meet Our Editors
Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA 95054 95054 USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955
Further Links
IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional.
Aims & Scope
IEEE Transactions on Semiconductor Manufacturing addresses innovations of interest to the integrated circuit manufacturing researcher and professional. Includes advanced process control, equipment modeling and control, yield analysis and optimization, defect control, and manufacturability improvement. It also addresses factory modelling and simulation, production planning and scheduling, as well as environmental issues in semiconductor manufacturing.
Persistent Link: http://ieeexplore.ieee.org/servlet/opac?punumber=66 More »
Frequency: 4
ISSN: 0894-6507
Publication Details: IEEE Transactions on Semiconductor Manufacturing
Subjects
- Aerospace
- Bioengineering
- Communication, Networking & Broadcasting
- Components, Circuits, Devices & Systems
- Computing & Processing (Hardware/Software)
- Engineered Materials, Dielectrics & Plasmas
- Engineering Profession
- Fields, Waves & Electromagnetics
- General Topics for Engineers (Math, Science & Engineering)
- Nuclear Engineering
- Photonics & Electro-Optics
- Power, Energy, & Industry Applications
- Signal Processing & Analysis
- Transportation
Contacts
Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA 95054 95054 USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955
About this Journal
Content Announcements
Author Resources
Society Sponsor
Contacts
Editor-in-Chief
Dr. Sean P. Cunningham
Intel Corporation
RN4-80
2200 Mission College Boulevard
Santa Clara, CA 95054 95054 USA
sean.p.cunningham@intel.com
Phone:+1 408-653-5955
