A solution to characteristics of planar transmission lines made of finite-thickness metal on multi-layer media

When analyzing signal transmission characteristics of metal lines on semiconductor devices and circuits, the assumption that metal is perfectly conducting is not always valid. A simple, accurate way to include metallic loss in spectral-domain analysis of planar transmission lines built on multilayer semiconducting media is presented. Applications to analyzing IC interconnection delays, calculating FET gate electrode losses, and optimizing monolithic slow-wave devices are described.<
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