A large stepwise motion electrostatic actuator for a wireless microrobot

An original large stepwise motion electrostatic microactuator for a wireless microrobot using a distributed Ciliary Motion System (CMS) [1] is presented. Coventorware/sup TM/ cosolver simulations have shown x-displacement of 240 nm for one actuation step. Design of the antennas for inductive powering has been optimized in order to maximize the energy transfer. 24 /spl mu/m gold electroplated hollow micro-coils have been fabricated on an epoxy substrate as receiver antennas. Q-factor of 29 at 13.56 MHz and induced voltage up to 100 V on a 1 k/spl Omega/ load has been obtained. Remote actuation of an array of actuators supporting a 0.25 mm/sup 2//380 /spl mu/m-thick piece of silicon has been successfully demonstrated with a pull-in voltage of 80 V.