Nano meter stepping drive of surface acoustic wave motor

A high resolution, from nanometer to sub-nanometer, stepping drive of a surface acoustic wave (SAW) motor is presented in this paper. A step displacement was controlled easily by a number of driving waves from centimeter order to nanometer order. Reduction of the driving waves down to 25 cycles, at 100 V/sub peak/ driving voltage and 30 N pre-load condition, brought about 2 run stepping drive with our experimental setup at open loop condition. We also demonstrated a sub-nanometer stepping drive. These experimental results indicate that the surface acoustic wave motor has subnanometer positioning ability with centimeter stroke.