Optimized operations by extended X-factor theory including unit hours concept

The relationships between tool performance, cycle time, and throughput have been described to achieve the highest productivity. Though tool utilization is low for manually operated tools, long waits prior to product processing lead to a productivity loss in our production line. We focus on operator efficiency in the CMP (chemical mechanical polishing) operation, which, as a typical manually operated tool, influences cycle time. This paper introduces an online/offline unit hour analysis method, which has been designed to optimize operator allocation and headcount in our production line, using X-factor theory in order to achieve the shortest cycle time. By using online/offline unit hour analysis with X-factor theory, the root cause of waiting time can be identified and the relationship between operator headcount and cycle time can be described. The waiting time can be reduced by 35% and the cycle time can be reduced by 25%, according to a simulator with optimized operator allocation and headcount based on online/offline unit hour analysis.