Micro-system process for education: morphological and electrical characterization

An advanced practical work in characterization of microsystems for education is presented. It concerns the measurements of morphological and electro-mechanical properties of a pressure sensor consisting of piezoelectric poly-Si gauges on a membrane. A variety of techniques is used during the fabrication in a clean room, to control the process and characterize the materials (SiO/sub 2/, poly-Si). After complete processing, the sensitivity of the pressure sensor is determined. The influence of the doping, annealing and thickness of the poly-Si gauge is derived. This initiation is developed for the terminal year students of the Grenoble National Engineering School of Electronics (ENSERG) and the Grenoble National Engineering School in Physics (ENSPG).