Flexible inserter for IC testing based on force control

In assembly lines in industrial fields, the construction of advanced manufacturing system which could autonomously adapt to various process variations is desired. For this, it is necessary to accomplish a breakthrough in bringing "force control" techniques into use for the practical applications. In this paper, a case of solving the problem is reported which conventional position control is used to hold the inserter for IC testing in the semiconductor manufacturing process, by developing the high-speed sensorless force control technology.