Implantation mode dependence of damage structure depth profiles in Al/sub 2/O/sub 3/ irradiated with triple beam of H, He and heavy ions

The damage structures in Al/sub 2/O/sub 3/ after triple ion beam (H, He and/or N, O) irradiation were examined with cross-sectional TEM. Heavier ions penetration depths of He-and H-ions implantation enhanced growth of cavities produced by He- and H-ions, as compared with those produced by He-and H-ions only. Although peaks for He-implantation distribution are predicted by TRIM calculation to coincide with each other, cavity formation revealed the peaks to be separated appreciably.