SbF/sub 3/ as vaporizer feed material for the Bernas dual vaporizer in the VSEA E220/500 implanters

Tests were carried out to determine the operating characteristics of the SbF/sub 3/ vaporizer for the E220/500 Implanter. The rationale for the selection of SbF/sub 3/ as the preferred vaporizer material is explained. The setup cup beam current and arc current vs. arc voltage characteristics for the temperature range of operation are given. These characteristics should serve to guide the selection of operating points. The recommended operating parameters are vaporizer temperatures between 135 and 160/spl deg/C, arc voltages between 35 and 50 V, and arc currents around 1.0 A.