S-parameter broadband measurements on-coplanar and fast extraction of the substrate intrinsic properties

A broadband technique for determining the electromagnetic properties of isotropic thin-film materials, which uses a coplanar line, is presented. Complex permittivity and permeability are computed from S-parameter measurements of a coplanar cell propagating the dominant mode. Measured /spl epsi//sub /spl tau// and μ/sub /spl tau// data for several materials are presented between 0.05 GHz and 40 GHz. This technique shows a good agreement between measured and predicted data.