A monolithic inkjet print head: DomeJet

This paper describes a thermally driven monolithic inkjet print head, DomeJet, that consists of dome-shaped ink chambers and thin film nozzle guides. Nozzle guides are fabricated by anisotropic etching after PECVD oxide passivation of their side walls. Each of the ink chambers and channels are fabricated by isotropic dry etching process using XeF/sub 2/. Omega or ring type polysilicon heaters are integrated on top of each chamber. Fifty-six nozzles are embedded at two columns on each chip where their pitch is 1/150 inch at each column. A pulse voltage of 2.6 /spl mu/s has been used in initial printing tests, resulting in 36 /spl mu/m diameter dots on a HP transparent film that was placed 1 mm away from the nozzle 18 /spl mu/m wide. The drop volume and velocity are measured to be 4 pl and 12 m/s, respectively. A printed image is successfully obtained using the fabricated head installed to a Samsung inkjet printer.