Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring

We have designed and fabricated a magnetically actuated micromirror device. The fabricated device can be used in optical switching applications that require large angular deflection of the reflected beams. The fabrication process is a combination of surface and bulk micromachining, which can be characterized by the capability to form large flat bulk silicon structure and flexible metal spring. The fabrication process can be utilized in the fabrication of devices which require large flat structure and reduced energy in actuation.