Optimization of a vacuum arc discharge for soft-X-ray emission

A vacuum arc device has been developed, having in mind the soft-X-ray emission for X-ray detectors calibration, and for X-ray microlithography/microscopy research. The maximum condenser energy is 1-2 kJ, and the maximum discharge current is around 100 kA. The trigger pulse (applied to a rod inside the cathode) is generated by a magnetic pulse compression circuit, which provides 20 J/pulse, with 100 ns rise-time. These electrical parameters, combined with a proper cathode geometry, gave a reliable ignition of the vacuum arc discharge. A lot of studies have been made concerning the optimization of the vacuum arc device as a soft-X-ray source. During the experiments, the changed parameters were the condenser energy, the anode-cathode geometry, the anode material and the trigger pulse amplitude. For the maximization (more than 10 J per pulse) of the soft-X-ray emission, the best combinations of these parameters have been found.