Reflection, coupling and absorption of plane waves incident on an integrated circuit

Exact analytical expressions are given for the plane-wave complex reflection coefficient as a function of frequency at the air-dielectric interface of a three-layer model for an integrated circuit. Numerous curves are presented, exhibiting the nature of wave reflection from and power absorption by the integrated-circuit model. Expressions for those components of the electromagnetic field that can couple to the microcircuits also are given. Numerically computed results depend on both the angle of incidence and polarization of the incident plane wave as well as the electrical thickness and loss of the dielectric (silicon-substrate) layer.<
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