Demonstration of a micro-CPL based on MEMS fabrication technologies

Utilizing current micro electro mechanical systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator dimensions (1000 /spl mu/m/spl times/2000 /spl mu/m) and the length of the liquid and vapor lines (35 mm). Using laser spot heating, the finished device was run near steady-state. It was determined that a laser delivering 8.5 W (+/-0.2 W) with a spotsize diameter of 3.5 mm caused dry-out of the micro-CPL.