High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators

We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2× 10
⁶
at 1547.6 nm, and >0.8×10
⁶
throughout 1500-1600 nm.