Multi-Spectrum Analysis of Growth Temperature Dependent Crystal Structure of MgZnO Thin Films Grown on Sapphire

Mg
_0.06
Zn
_0.94
O films are epitaxially grown at 350 to 650
^o
C. Depolarization effect was found occurs at ~390 nm, while the thickness non-uniformity increases with growth temperature, ascribed to increased Mg incorporation into hexagonal ZnO phase.