Structure Design and Simulation Analysis of MEMS Ring Vibrating Gyroscope

A novel MEMS ring vibrating gyroscope with S springs is proposed, and the working principle, vibrating characteristics and sensitive working mode are analyzed, according to the working mechanism and vibrating characteristics of axially symmetric ring vibrating gyroscope. On this basis, the finite element model of the ring vibrating gyroscope is established by using ANSYS. Furthermore, the modal analysis, harmonic response analysis, impact transient analysis and static analysis is performed. The results of simulation and analysis show that the natural frequency difference between the driving and sensing mode is 1Hz and the minimum frequency difference between the working mode and other vibrating modes is 3304Hz, which can effectively resist the interference of environmental vibration. The maximum stress of the resonant structure is 104.46MPa under the transient influence of 10 000g, which can work stably.