A micromachined all-solid on-chip thin-film battery towards uninterruptible photovoltaic cells

We propose integrating the emergency power supply (micro Uninterruptible Power Supply, ^UPS): Integrating an energy rechargeable device on a chip to solve continuous power issue of photovoltaic cells. To realize ^UPS, we present fabrication and measurement of on-chip series-connected thin-film lithium batteries. Under the illuminated condition, series-connected PV cells directly feed multiple voltages to the system as well as charge the on-chip battery, and in case of shading it is the charged battery that feeds the system instead. The system is compatible with series-connected PV cells fabricated by CMOS MEMS post-processing. Fourteen series-connected battery was fabricated and 51.3 V was observed as the output of the battery.