Titanium dioxide (TiO2) and silver chloride (AgCl)-based pH sensor using spin coating method

Development of thick film-based sensor using new material alternatives has not experienced significant progress, in pH sensor especially. One of the reasons is the lack of research in the field of electrochemical sensors in manufacturing pH with new materials. This research aims to develop the performance of thick film (microfabrication)-based pH sensor with spin coating method. The materials used in microfabrication included AgCl as a reference electrode, TiO
₂
as working electrode and Al
₂
O
₃
as substrate. Sensor was fabricated using three designs with the electrode distance of 1.5, 1 and 0.5 mm. Experiment were carried out in room temperature with the observed parameters of voltage and current output of the pH sensor. These two parameters were used to calculate the sensitivity sensor. The results show that the electrode distance of 1.5, 1 and 0.5 mm revealed the sensitivity of -40.586 mV/pH, -45.229 mV/pH and -29.486 mV/pH respectively.