CMOS electronics probe inside a cellular network — Invited review paper

The parallelization of intracellular recording can greatly benefit the study of complex neuronal networks, but it has proven difficult to achieve. To meet this challenge, we have been developing large-scale arrays of intracellular vertical nanoscale electrodes operated by underlying CMOS integrated circuits. The development has been fruitful, and our first-generation CMOS nanoelectrode array hit a milestone by intracellularly recording from up to 235 networked cardiomyocytes in parallel. We reported this first-generation system and its unprecedented parallelism in intracellular recording in Nature Nanotechnology 12, 460 (2017). The present paper is a review of this work with a special focus on the development of its CMOS integrated circuit.