A 1Tb 4b/cell 64-stacked-WL 3D NAND flash memory with 12MB/s program throughput

Since the first demonstration of a production quality three-dimensional (3D) stacked-word-line NAND Flash memory [1], the 3b/cell 3D NAND Flash memory has seen areal density increases of more than 50% per year due to the aggressive development of 3D-wordline-stacking technology. This trend has been consistent for the last three consecutive years [2-4], however the storage market still requires higher density for diverse digital applications. A 4b/cell technology is one promising solution to increase bit density [5]. In this paper, we propose a 4b/cell 3D NAND Flash memory with a 12MB/s program throughput. The chip achieves a 5.63Gb/mm
²
areal density, which is a 41.5% improvement as compared to a 3b/cell NAND Flash memory in the same 3D-NAND technology [4].