Study of material surface shape detection model for MEMS tactile sensor by motion tracking

In this paper, a motion-tracking method that obtains the position (motion) information of each part of a running MEMS (Micro Electro Mechanical Systems) tactile sensor is proposed as the first step toward developing a material surface shape detection model. By observation and motion tracking with a high-speed camera, the motion information of each part of the sensor can be obtained, and the motion of the top of the contactor is acquired from the calculation. Results show that the top of the contactor follows the sample surface closely.