Design of tunable shunt and series interdigital capacitors based on vanadium dioxide thin film

Tunable coplanar waveguide interdigital capacitors (IDC) designed with vanadium dioxide (VO
₂
) thin film are presented in this paper. Two different configurations, series IDC and shunt IDC, are proposed. Tunable capacitance can be implemented by the thermally controllable VO
₂
thin film. The tunability of IDC structures are 95.6% and 85.4% corresponding to the series IDC and shunt IDC, respectively.