Simulation-based performance assessment of an implant scheduler in semiconductor manufacturing

The processes of implanting tools in semiconductor production involve a variety of setup parameters, suggesting utilization of a scheduler for planning lot allocation in a reasonable manner. However, a scheduler is complex by design, making evaluation difficult without appropriate aids. We describe an approach using discrete event simulation software for assessing the performance and supporting the parameterization of an implant scheduler. Furthermore, rolling-horizon approaches are discussed and the scheduler performance is compared to two dispatch rules.