A photonic crystal nanocavity with a quantum dot active region embedded by MBE regrowth

We fabricated a two dimensional photonic crystal nanocavity embedding a spatially-isolated active region containing InAs quantum dots using crystal regrowth with molecular beam epitaxy. We observed a cavity mode with a quality factor over 10,000, despite the existence of a mound structure on top of the buried active region due to faceting during the regrowth.