Mechatronic micro devices

Nowadays, novel trends can be observed in micro system technology: Micro systems more and more develop into stand-alone devices for multi-purpose applications, and they do not only comprise detector elements but really interact mechanically by micro actuators with their surroundings. A modular concept especially for high performance actuators which proved to be a main prerequisite for these developments is illustrated in the contribution. With dimensions of a few millimeters, piezo-driven valves and membrane pumps overcome fluid pressures of 1,000 hPa. Electromagnetic motors generate torques of 7 to 100 /spl mu/Nm which are multiplied by adapted micro gears. Gear motors serve as a key unit for high force micro positioning systems or micro gear pumps which are first examples for the device level. With the integration of electronics and optics the actuator performance can considerably be increased by establishing a feedback control and the systems become really micro mechatronic devices. Additionally, interface components like electrical and fiber-optical connectors with pitches as small as 250 /spl mu/m, special gears and miniaturized clamping structures enable the implementation of complex optical fiber networks, micro robots or chemical micro reactors from these mechatronic devices in a construction kit. A wide range of 3D-micro fabrication techniques, from design and simulation, micro spark erosion (/spl mu/-EDM) for the prototypes to mass technologies like LIGA including injection molding, allows a fast commercialization into "micro product lines" and will round the circle of the considerations on the mechatronic micro devices.