Si3N4 photonic integrated circuit for multi-baseline interferometric imaging

We present design, fabrication and characterization of a compact photonic integrated circuit consisting of tri-layer Si
₃
N
₄
platform including path-length-matching waveguides, multi-layer vertical couplers, arrayed waveguide gratings as demultiplexers, multimode interferometers and heater based phase tuner for long-baseline interferometric imaging.