Modeling and design of a micromachined Fabry-Perot interferometer

A physical model and its application to the design of a micromachined low-order tunable Fabry-Perot interferometer are discussed. The optical properties of the thin films as well as their surface defects are taken into account. The dependence of the free spectral range and the transmission bandwidth on the phase change which occurs on reflection are emphasized. A computer program written in MATLAB was applied to a particular structure.