Experimental monitoring data for prognostics and health management of MEMS

This paper presents the data acquisition step of a Prognostics and Health Management (PHM) of Micro-Electro-Mechanical Systems (MEMS) application. The targeted MEMS device is an electro-thermally actuated MEMS valve. The data acquisition is performed during the accelerated lifetime tests. To perform tests, an experimental test bed is designed and built. Several test campaigns are performed where MEMS valves operated continuously and data acquired regularly. The obtained experimental results show that MEMS fabricated with the same micro-fabrication process and tested in the same conditions do not have the same behavior and the same evolution of degradation in time. Therefore, this supports the importance of applying PHM of MEMS rather than the predictive reliability.