A nonlinear large signal equivalent circuit model for a square CMUT cell

An accurate nonlinear lumped equivalent circuit model is used for modeling of capacitive micromachined Ultrasonic Transducers (CMUTs). Finite element analysis (FEA) is a powerful tool for the analysis of CMUT arrays with a few number of cells while with the equivalent circuit model, the entire behavior of a large-scale arbitrary CMUT array can be modelled in a very short time. Recently, an accurate nonlinear equivalent circuit model for un-collapsed single circular CMUT cells has been developed. However, the need for an accurate circuit model for CMUT cells with square membranes motivated us to produce a new nonlinear equivalent circuit model for un-collapsed CMUT cells on an infinite rigid baffle.