Operator error prevention system of semiconductor foundry manufacturing

The purpose of this paper is to introduce the operator error prevention system. This system divides the prevention process of operator-related errors into several stages: (1) task analyses and human error identification; (2) classification of human errors; (3) deployment of optimal prevention action; (4) control of error preventive solutions, (5) monitoring and evaluation on potential human error risk. A brief example is provided to illustrate how to implement this system. Since this system was implemented from March 1998, the operator error events were reduced from 163 times in 1997 to 19 times in 1998. The loss from wafers scrapped was reduced from $3,000,000 dollars in 1997 to $360,000 dollars in 1998. The results show the effectiveness of the operator error prevention system.