Broadband mid infrared photonic integrated components using a Ge-rich SiGe platform

We demonstrate low-loss mid infrared photonic integrated components fabricated on a Ge-rich Si
_1-x
Ge
_x
platform. These devices show broadband operation over a wavelength range of at least from λ ≈ 5.1 μm to λ ≈ 8.6 μm, and comprise waveguides, multimode interference couplers and Mach-Zehnder interferometers.