Structural design and optimization of MEMS based capacitive accelerometer

A MEMS Capacitive Accelerometer which have symmetrical beam-mass structure with different interconnection has been described in this paper. Design of a H-shaped beam capacitive accelerometer is described using finite element analysis software. Output voltage is calculated with respect to the given accelerations as well as sensitivity of the device is analyzed. To improve sensitivity of the device, two new connector structures has been proposed. For a particular acceleration displacement of the proof mass is increased almost 57% and 66% and the sensitivity has been improved from 7.71pF/g to 13.0pF/g and 13.8pF/g respectively.