A single-chip wireless microelectrode array for neural recording and stimulation

A single-chip ultra-low power wireless microelectrode array (MEA) for neural recording and stimulation is implemented. The device is fabricated in GlobalFoundries 45 nm CMOS SOI technology and post processed without using additional lithography to achieve a thin fully functional and flexible system. The design occupies a volume of 0.008 mm
³
and integrates a 2D MEA with 9 active neural field potential channels and a miniaturized antenna for wireless powering and communication. The system consumes 15 μW of power per channel at a sensing rate of 26 kS/s. System measurement and in-vitro tests with live mouse brain cells have been conducted.