ESD Robustness Enhancement Study of Ultra-High-Voltage JFET With Ballast Structure

Electrostatic discharge (ESD) robustness improvement of ultra-high-voltage devices is a challenging task. This paper presents an ESD robustness enhancement study of an 800 V junction field-effect transistor (JFET) including a silicon-controlled rectifier (SCR) structure. During a human body model (HBM) event, the fabricated SCR-JFET showed a deep voltage snapback and an unexpectedly high current peak, resulting in an ESD failure due to current filamentation. 3-D TCAD analysis is effectively utilized for ESD enhancement study. First, 3-D HBM simulation reproduces the current filamentation phenomenon and the observed ESD failure. Then, a drain modified SCR-JFET, which includes a p+ ballast region, is studied. TCAD simulations demonstrate ESD robustness improvement with the ballast device and make clear its performance enhancement mechanism. Based on the TCAD study results, the ballast device is fabricated. Photo-emission microscope measurement results clearly show an alleviation of the current filamentation. As a result of HBM tests, we successfully improve HBM robustness from 1.93 kV to 2.63 kV with the ballast structure.