New micromachined inductors on silicon substrates

Microinductors with two layer vertically stacked spiral-type copper conductor lines and permalloy core have been fabricated, characterized, and compared using micromachining techniques. In this research, micromachined inductors with vertically laminated magnetic alloy cores are found to have better high frequency characteristics such as high inductance, high quality factor, and low AC resistance resulting in low magnetic core losses at high frequencies, than non-laminated types.