Measurement analysis of multiple MEMS sensor array

The low cost and small size of MEMS inertial sensors allows their combination into a multi sensor module in order to improve performance. However the different linear accelerations measured on different places on a rotating rigid body have to be considered for the proper fusion of the measurements. The errors in measurement of MEMS inertial sensors include deterministic imperfection, but also random noise. The gain in accuracy of using multiple sensors depends strongly on the correlation between these errors from the different sensors. Although for sensor fusion it usually assumed that the measurement errors of different sensors are uncorrelated, estimation theory shows that for the combination of the same type of sensors actually a negative correlation will be more beneficial. Therefore we describe some important and often neglected considerations for the combination of several sensors and also present some preliminary results with regard to the correlation of measurements from a simple multi sensor setup.