A high-Q three-dimensional terahertz metamaterial perfect absorber

In this paper, we present a three-dimensional (3D) terahertz metamaterial perfect absorber (MPA) with a high quality factor. The absorption response of the proposed structure is analyzed and optimized using coupled mode theory and numerical simulations. Subsequently, we fabricate the 3D MPA by employing the multi-layer electroplating process and characterize it using terahertz time domain spectroscopy. A quality factor of 20 is verified by the experimental results, which agrees well with the simulation. The high-Q MPA has potential applications in chemical and biological sensing.