A lorentz force magnetometer based on a piezoelectric-on-silicon radial-contour mode disk

We report a unique MEMS magnetometer based on a disk shaped radial contour mode thin-film piezoelectric on silicon (TPoS) CMOS-compatible resonator. This is the first device of its kind that targets operation under atmospheric pressure conditions as opposed that existing Lorentz force MEMS magnetometers that depend on vacuum. We exploit the chosen vibration mode to enhance coupling to deliver a field sensitivity of 10.92 mV/T while operating at a resonant frequency of 6.27 MHz, despite of a sub-optimal mechanical quality (Q) factor of 697 under ambient conditions in air.