A qualitative technique to study stability and dynamics of micro-machined inductive contactless suspensions

A qualitative technique to study dynamics and stability of Micro-machined contactless Inductive Suspensions (MIS) is presented, which provides a powerful analytical tool for a comprehensive study of a wide range of MIS designs. The main idea for this technique is to represent the induced eddy current into a levitated micro-object as a collection of m-eddy current circuits. It allows us to obtain a generalized linear model of MIS, based on which general stability properties of MIS are investigated. We demonstrate the successful application of this technique to study the symmetric and axially symmetric MIS designs of real prototypes.