Magnetically driven energy-harvester with monolithically integrated high-energy-density magnets

This paper presents the first piezoelectric MEMS energy-harvester with monolithically integrated fully back-end-of-line compatible high-energy-density micromagnets. At resonance a power output of up to 20 μW is reported which is by orders of magnitude higher than state-of-the-art magnetic MEMS harvesters. Due to the high energy density and large volume of the integrated micromagnets the harvester exhibits a high area-normalized power output of about 5 μW/mm
²
.