A review on the performance parameters of disk resonators

This paper reviews the performance parameters of various disk resonators based on different transduction methods available. MEMS resonators are more advantageous when compared to conventional resonators due to their small size. It is found that Q-factor (Q) increases with decrease in the energy density of the material while keeping all other geometries constant. The piezoelectric resonators provide low motional resistance which enhances the system performance. Capacitive resonators provide high Q which is suitable for timing and sensing applications. As the Q factor increases, its sensitivity increases as a result its performance is enhanced. By combining both transduction methods Q factor and motional resistance can be optimized as discussed in this paper.